Builds the theoretical foundation for understanding, modelling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices. Offers cutting-edge information on the subject, which applies to many fields. DLC: Microelectromechanical systems.
Ch1. Nano- and Microengineering, and Nano- and Microtechnologies
Ch2. Mathematical Models and Design of Nano- and Microelectromechanical Systems
Ch3. Structural Design, Modeling, and Simulation
Ch4. Control of Nano- and Microelectromechanical Systems